Design and Fabrication of MEMS Humidity Sensor using Graphene Oxide
L. Chitra

Dr. L. Chitra, Associate Professor, Department of Electrical and Electronics Engineering, Aarupadai Veedu Institute of Technology, Chennai (Tamil Nadu), India.

Manuscript received on 10 November 2019 | Revised Manuscript received on 18 December 2019 | Manuscript Published on 31 December 2019 | PP: 532-535 | Volume-9 Issue-2S4 December 2019 | Retrieval Number: B11931292S419/2019©BEIESP | DOI: 10.35940/ijitee.B1193.1292S419

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Abstract: This work describes the consequence of graphene oxide on the paddle shaped cantilever structure for the measurement of humidity in oil condition monitoring .The oxides present in the graphene has an significant effect in absorbing the content of water that available in the earth. The model for humidity sensor is designed and simulated using comsol Multiphysics. Various structures were simulated and the best structure is chosen for designing the humidity sensor. Graphene oxide was chemically synthesized from graphite powder. Thin film of GO was deposited on Aluminium substrate using spin coating. Various materials were analysed and the best material is coated on the substrate for humidity sensing. The samples were characterized using Scanning electron Microscope and Xray Diffraction methods. The sensitivity is ten times better than the conventional humidity sensor. The response time is fast less than ¼ of the conventional type. The recovery time of the graphene oxide based humidity sensor is also less than ½ of the conventional one.

Keywords: Comsol Multiphysics, Cantilever, Comb Drive Capacitor, Diaphragm, Membrane, MEMS, Thermal Actuator, Stress.
Scope of the Article: Microstrip Antenna Design and Application