Modeling and Simulation of MEMS Comb Accelerometer for Sensitivity Improvement
Anusha Ganta1, Satyanarayana Talam2, Neela. R3
1Anusha Ganta, Department of Electrical and Electronics Engineering, Annamalai University, Chidambaram, India.
2Satyanarayana Talam Anusha Ganta, Department of Electronics and Instrumentation Engineering, Lakireddy Bali Reddy College of Engineering (A), Mylavaram-521230, India. Corresponding Author:
3Neela.R, Department of Electrical and Electronics Engineering, Annamalai University, Chidambaram,India..
Manuscript received on 02 June 2019 | Revised Manuscript received on 10 June 2019 | Manuscript published on 30 June 2019 | PP: 2578-2583 | Volume-8 Issue-8, June 2019 | Retrieval Number: H7415068819/19©BEIESP
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© The Authors. Blue Eyes Intelligence Engineering and Sciences Publication (BEIESP). This is an open access article under the CC-BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/)
Abstract: In this paper, we designed three axes comb type capacitive accelerometer and simulated under conditions of varying integrated finger width from 1 to 9 µm and applied acceleration from 1g to 10g. The width of the fingers and length of the fingers must be optimized to realize the linear change between displacement and acceleration. When the width of the fingers increases under constant finger length, then capacitance found to increase that could be due to decrease in distance between plates and displacement of proof mass. But, when increase in finger length for given finger width, then displacement found to increase significantly. The mechanical sensitivity is evaluated using displacement against acceleration in terms of applied force. Simulation results have shown linear change in the displacement with acceleration. From the analyses of results, it has been evidenced that the minimum and maximum mechanical sensitivities are found to be 1.41µm/N and 2.51µm/N respectively.
Keyword: Capacitive Accelerometer, COMSOL Multiphysics v 4.4b, Deformation, Displacement, Sensitivity.
Scope of the Article: Computer Graphics, Simulation, and Modelling.