Optimized Design of CMUT with Hexagonal Membranes
Rashmi Sharma1, Rekha Agarwal2, Ashwani Kumar Dubey3, Anil Arora4

1Rashmi Sharma,Department of ECE, Amity School of Engineering & Technology, New Delhi, India
2Rekha Agarwal, Department of ECE, Amity School of Engineering & Technology, New Delhi, India
3Ashwani Kumar Dubey, Department of ECE, Amity University, Noida, Uttar Pradesh, India.
4Anil Arora, Department of ECE, Thapar University, Patiala, Punjab, India.

Manuscript received on 02 July 2019 | Revised Manuscript received on 09 July 2019 | Manuscript published on 30 August 2019 | PP: 1805-1809
| Volume-8 Issue-10, August 2019 | Retrieval Number: J91940881019/2019©BEIESP | DOI: 10.35940/ijitee.J9194.0881019

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© The Authors. Blue Eyes Intelligence Engineering and Sciences Publication (BEIESP). This is an open access article under the CC-BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/)

Abstract: A Capacitive Micro-machined Ultrasonic Transducer (CMUT) with hexagonal membrane is constructed to work as a transmitter and compared to a CMUT with circular membrane. In this paper, three desirable combination of circular and hexagon are analyzed to select the dimensions for hexagonal shaped CMUT. Capacitive Micro-machined Ultrasonic Transducer (CMUT) is a micro constructed transducer used both as transmitter for generating ultrasonic waves and as receiver to modulate the electrical capacitance of the capacitive transducer. It can be fabricated with many geometries especially circular, square, rectangular, and hexagon. Circular CMUTs offers optimum performance in terms of deflection with DC, deflection of biased membrane with AC bias, resonant frequency, capacitance and deflection along frequency but for array formation the wafer area is wasted. A CMUT with hexagonal membrane gives an ultrasonic signal of constant amplitude with less deflection of membrane within the cavity and the outside environment. Stationary analysis is carried out with electro-mechanics for discussing the capacitance change of CMUT. The collapse or pull in voltage of hexagon CMUT is found to be high and increases the bandwidth of CMUT. The absolute percent difference of resonant frequency is observed to be 2.3 % with dimensions selected from the COH configuration of the CMUT.
Keywords: Array Formation, COH Configuration, Capacitance, Electro-mechanics, Geometries, Ultrasonic Signal
Scope of the Article: Design Optimization of Structures