Software Package Application for Self-consistent Processing of X-ray Measurement Data for Studying Structural Properties and Parameters of Objects
Medetov N.A.1, Petrakov D.S.2, Gerasimenko N.N.3, Suyundukov R.A.4

1Medetov N.A.*, Doctor of Physical and Mathematical Sciences, A. Baitursynov Kostanay Regional University, Kostanay, Kazakhstan.
2Petrakov D.S., Master of Engeneering, Moscow Institute of Electronic Technology, Moscow, Russian Federation.
3Gerasimenko N.N., Doctor of Physical and Mathematical Sciences, Professor, Moscow Institute of Electronic Technology, Moscow, Russian Federation.
4Suyundukov R.A., Master of Engineering, A. Baitursynov Kostanay Regional University, Kostanay, Kazakhstan. 

Manuscript received on September 11, 2020. | Revised Manuscript received on September 23, 2020. | Manuscript published on October 10, 2020. | PP: 154-158 | Volume-9 Issue-12, October 2020 | Retrieval Number: 100.1/ijitee.L78911091220 | DOI: 10.35940/ijitee.L7891.1091220
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Abstract: The article presents the results of TiN diffusion-barrier layers studies on a silicon substrate, carried out with the use of the copyrighted software package. In this paper, it is proposed to use several methods for studying the structures and combine them in the form of an integrated approach, which allows not only to increase the calculation accuracy but also to solve most of the arisen problems. Based on this approach, an automated software package for X-ray spectral and X-ray structural analysis was developed to study the elemental and phase composition of the objects, including the analysis of ore minerals, which allows not only to obtain a more complete and detailed picture of the studied objects, but also to increase the sensitivity threshold detection of individual elements that are not detected by individual methods of analysis. 
Keywords: Automated system, X-ray research methods, Nanoelectronics, X-ray reflectometry, Refractometry, Diffuse scattering.